APPARATUS FOR VAPOR GROWTH,申请号JP19870308758-传众专利搜索

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发明名称	APPARATUS FOR VAPOR GROWTH
摘要
申请公布号	JPH01153597(A)	申请公布日期	1989.06.15
申请号	JP19870308758	申请日期	1987.12.08
申请人	TOSHIBA CORP	发明人	OMINE TOSHIMITSU;ISHIHATA AKIRA
分类号	C30B25/12;H01L21/205	主分类号	C30B25/12
代理机构		代理人
主权项
地址

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