METHOD AND APPARATUS FOR GENERATING PARTICLE BEAMS

摘要

PCT No. PCT/GB88/00938 Sec. 371 Date Apr. 11, 1990 Sec. 102(e) Date Apr. 11, 1990 PCT Filed Oct. 28, 1988 PCT Pub. No. WO89/04586 PCT Pub. Date May 18, 1989.A source of atomic or molecular particles includes a source of ionized particles (1), an extraction electrode (2) and an einzel lens (3) to focus a beam of particles. A Wien filter (4) selects particles in said beam having a predetermined velocity and a charge exchange cell (7) neutralizes the ionized particles prior to the extraction of non-ionized particles from the beam.