Arrangement for machining workpieces by means of a laser beam by building up a plasma that is to be kept within limits

摘要

PCT No. PCT/EP85/00328 Sec. 371 Date Apr. 17, 1986 Sec. 102(e) Date Apr. 17, 1986 PCT Filed Jul. 5, 1985 PCT Pub. No. WO86/00552 PCT Pub. Date Jan. 30, 1986.In machining a workpiece, maximal absorption of laser irradiation in the workpiece is achieved by a minimal interference by optical back-coupling and plasma effects is achieved by continuously determining the actual value of the laser irradiation and continuously sensing stochastic processes taking place in the machining zone and in response to such measuring and sensing, controlling the modulation of laser irradiation.