发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME.
摘要 On an n-type single-crystal silicon base (21), an insulating layer (22), a gate electrode (5), another insulating layer (2) and a middle layer (23) are formed using the CVD method. After polishing the top layer down to a flat surface (q), another insulating layer (44) and a silicon substrate (1) are formed, whichmakewhich makes a supporting body (11). The other side of the semiconductor layer (21) is then polished down (6), on top of which formed are o another insulating layer (24), another gate electrode (26), a soruce region (27), a drain region (28), another insulating layer (29), a source electrode (31) and a drain electrode (32). These electrodes (31,32) form a part of a second layer (6) as opposed to a first wiring layer (5) consisting of the gate electrode.
申请公布号 EP0299087(A4) 申请公布日期 1989.06.13
申请号 EP19880901309 申请日期 1988.01.29
申请人 SONY CORPORATION 发明人 HAYASHI, HISAO;MATSUSHITA, TAKESHI
分类号 H01L27/00;H01L21/02;H01L21/336;H01L21/768;H01L21/8234;H01L23/528;H01L27/088;H01L27/12;H01L29/78;H01L29/786;(IPC1-7):H01L21/88 主分类号 H01L27/00
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