| 摘要 |
PURPOSE: To make a developing soln. substantially free from metal ions by incorporating quat. ammonium hydroxide and N,N-dialkylalkanolamine as active components and specifying the weight ratio between them and the total concn. CONSTITUTION: This developing soln. is an aq. soln. of a positive type photoresist developer contg. quat. ammonium hydroxide and N,N- dialkylalkanolamine as active components. The pref. weight ratio between the former and latter is 10:1 to 1:20, especially 1:1 to 1:10. The pref. total amt. of them in the soln. is 1-30wt.%, especially 4-12wt.%. This developing soln. has a very low metal ion content and it is unnecessary that expensive deionized water is used so as to remove a trace of metal ions. |
