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发明名称
ION IMPLANTATION APPARATUS
摘要
申请公布号
JPH02260360(A)
申请公布日期
1990.10.23
申请号
JP19890081756
申请日期
1989.03.31
申请人
ULVAC CORP
发明人
SAITO MASAKI;FUJIYAMA JIYUNKI
分类号
H01J37/147;H01J37/317;H01L21/265
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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