BEAM PROFILER

摘要

PURPOSE:To have high precision measurement by combining micro-electrodes in rows with slits. CONSTITUTION:An ion beam 112 generated by an ion source 10 reaches an electrode 22 as part of a beam profiler via a slit 14. This electrode 22 is composed of a number of micro-electrodes 18 consisting of very small conductive parts and insulating parts arranged alternately. The slit 14 as part of beam profiler has a width approx. the same as that of conductive part 18 and is movable in the direction 15 perpendicular to the beam stream in the position that the ion beam 16 stream after passing the slit 14 is intersected. This enables processing of an electrode in simple construction and with small pitch as well as measurement with high resolution.