| 摘要 |
PURPOSE:To reproduce the metal organization of the rough particle region of the neck part of a bonding wire, by making a pulse current to directly flow into the entire length of the bonding wire, whose diameter is 10mum-100mum, and heating the wire. CONSTITUTION:A piece of bonding wire 1 is clamped with electrodes 2a and 2b. A constant current is supplied into the wire 1 from a constant current source (a), and the wire is heated. At this time, the current conducting time is adjusted with a pulse width control circuit (b). The wire heating length is adjusted with a slide plate 3 and a feed screw 4. The wire heating cycle at the time of the current conduction is measured with a radiation thermometer 5 over a minute range (10-20mum). Meanwhile, the wire 1 is thermally expanded in heating and deviated from the spot of the thermometer 5. Therefore, tension is imparted to the wire 1 in order to keep linearity even in heating with a slide bearing 6 and a spring 7 so that the wire 1 is not bent by the thermal expansion. A load cell 8 monitors the state so that the tension does not become excessive. A shielding chamber 12 is used for preventing the fluctuation in temperature of the wire 1. |
