| 摘要 |
PURPOSE:To perform observation in such a state that a vacuum container is held under vacuum and to obtain a clear image having no strain, by providing a guide pipe, a vacuum sealing window and a reflecting mirror. CONSTITUTION:The guide pipe 101 having a vacuum seal window 103 provided to the bottom part thereof, inserted in the observing machinery insert and removing port 109 of a vacuum container and an observation optical system observing the interior of the vacuum container through the seal window 103 provided in the guide pipe 101 are mounted. Further, the reflecting mirror 104 revolvable around X- and Y-axes crossing each other at a right angle provided below the guide pipe 101, a plurality of the shafts 107a-c provided so as to be movable up and down through the bottom part of the guide pipe 101 and a reflecting mirror posture control system for driving said shafts up and down to control the posture of the reflecting mirror 104 are mounted. Since the posture of the reflecting mirror 104 can be controlled by driving the shafts 107a-c in an up-and-down direction, the seal window 103 of the guide pipe 101 can be made of a plate-shape glass window. Therefore, observation can be performed in such a state that the vacuum container is held under vacuum and a strain free sharp image can be obtained. |
