发明名称 APPARATUS FOR LAMINATING AND CUTTING PHOTORESIST WEB
摘要 PURPOSE: To execute precise cutting without interruption of a lamination operation by providing the device with movable vacuum bars for surely holding a photoresist web by suction and a cutting device for parallel cutting of the photoresist web during the lamination operation. CONSTITUTION: The vacuum bars 4, 4 are fixed to piston rods 35, 36 of actuators 6, 6. One of the actuators is arranged above and below the passage of a substrate 26 on a supplying carriage 2 and the other one is arranged below the passage. Proximity switches 27, 28 and 31, 32 are respectively arranged parallel with the piston rods 35, 36 at the places of a slight distance. Upper and lower cutting belts 5 are arranged near the vacuum bars 4, 4 and are electrically heated. These belts 5 are respectively fixed to holding beams 14, 14 which are coupled to the piston rods 48, 49 of the actuators 7, 7. The cutting belts 5, 5 extend over the entire width of a base material 26 in a transverse direction with respect to the traveling direction A of the base material 26, by which the cutting motion of an arrow A is executed.
申请公布号 JPH01147547(A) 申请公布日期 1989.06.09
申请号 JP19880271078 申请日期 1988.10.28
申请人 HOECHST AG 发明人 MARUTEIN SHIYUTORUKU
分类号 G03F7/26;B26D1/08;B26D5/32;B26D5/38;B26D7/01;B29C31/00;B32B37/22;B32B38/00 主分类号 G03F7/26
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