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发明名称
摘要
申请公布号
JPH0332421(U)
申请公布日期
1991.03.29
申请号
JP19890092074U
申请日期
1989.08.04
申请人
发明人
分类号
H01L21/52;(IPC1-7):H01L21/52
主分类号
H01L21/52
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代理人
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地址
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