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发明名称
A silicone resist materials containing a polysiloxane and a photo-sensitive agent
摘要
申请公布号
US5017453(A)
申请公布日期
1991.05.21
申请号
US19890304231
申请日期
1989.01.31
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
ONISHI, YASUNOBU;HAYASE, SHUJI;HORIGUCHI, RUMIKO;HIRAO, AKIKO
分类号
C08G77/14;C08G77/26;C08G77/48;C08G77/60;C08L83/16;G03F7/075
主分类号
C08G77/14
代理机构
代理人
主权项
地址
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