FORMATION OF FILM ON POWDER,申请号JP19870303393-传众专利搜索

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发明名称	FORMATION OF FILM ON POWDER
摘要
申请公布号	JPH01147065(A)	申请公布日期	1989.06.08
申请号	JP19870303393	申请日期	1987.12.02
申请人	ULVAC CORP	发明人	KAWAMURA HIROAKI
分类号	C23C14/50	主分类号	C23C14/50
代理机构		代理人
主权项
地址

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