| 摘要 |
<p>PURPOSE:To obtain an inspection prober capable of reducing inspection time without damaging a thin film transistor substrate, by arranging, on the substrate, electrodes divided into many portions, and a circuit system belonging to each electrode, and arranging, on the electrode forming surface of the substrate, a contact layer of anisotropic conductive rubber having conductivity in the thickness direction. CONSTITUTION:On a substrate 11, are formed electrodes divided into many portions, and a circuit system which belongs to each electrode 8, and can connect electrically only a signal from a selected electrode 8 to an external circuit. On the surface where the electrodes 8 are formed on the substrate 11, a contact layer 3 is installed which is made of anisotropic conductive rubber having conductivity in the thickness direction. For example, the substrate 2 of a prober is constituted as follows. On one surface of a glass substrate 11, many source electrodes 8 having the same pattern as the transparent electrode 13 of a thin film transistor substrate are divided and formed via an SiO2 insulating film. Many thin film transistors 9 are formed so as to connect with each source electrode 8. Each of the thin film transistors 8 is connected with horizontal gate lines 10' and transversal drain lines 12, and both lines 10', 12 are connected to a signal processing part.</p> |
