NEGATIVE TYPE RADIATION-SENSITIVE RESIN COMPOSITION

摘要

PURPOSE:To obtain a resist compsn. hardly generating fine particles by dissolving an alkali-soluble resin and an azido compd. in a solvent contg. monoxymonocarboxylic esters. CONSTITUTION:An alkali-soluble resin and an azido compd. are dissolved in a solvent contg. monoxymonocarboxylic esters. The solvent is desirably a compd. represented by a formula R1O-R2-COOR3 (where R1 is H or 1-3C alkyl, R2 is 1-4C alkylene and R3 is 1-4C alkyl). A resin compsn. capable of reducing the number of fine particles generated and hardly undergoing a change in the performance as a resist can be obtd.