DEVICE FOR PULLING UP SINGLE CRYSTAL,申请号JP19870305238-传众专利搜索

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发明名称	DEVICE FOR PULLING UP SINGLE CRYSTAL
摘要
申请公布号	JPH01145391(A)	申请公布日期	1989.06.07
申请号	JP19870305238	申请日期	1987.12.02
申请人	MITSUBISHI METAL CORP;JAPAN SILICON CO LTD	发明人	YAMASHITA ICHIRO;FURUYA HISASHI;SHIMIZU KOTARO;BANBA YOSHIAKI;SHIMANUKI YASUSHI
分类号	C30B15/00;H01L21/18	主分类号	C30B15/00
代理机构		代理人
主权项
地址

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