| 摘要 |
PURPOSE:To make an LSI mask easily handleable and hardly slippable by forming antislipping parts in the periphery of the mask. CONSTITUTION:Recesses 3, 5 as antislipping parts are formed in the opposite two sides of the periphery 4 of an LSI mask 1 having an LSI pattern 2 on the surface. It is important that the recesses 3, 5 have such a size as to exert no influence on the production of LSI. The size of the recesses 3, 5 is so regulated that the recesses 3, 5 are easily held by fingers. Since the recesses 3, 5 can be held by fingers, the mask 1 is made easily handleable and hardly slippable. |
