发明名称 WIRE BONDING APPARATUS
摘要 PURPOSE:To realize a simplified clamp having no movable part for high speed and mass-production system by applying a tension to a metal fine lead wire utilizing vacuum condition on the occasion of supplying a metal fine lead wire. CONSTITUTION:A tension clamp 30 is composed of a guide plate 22 having the groove 21 for supplying a metal fine lead, a porous material 23 provided at the bottom of groove 21 and a tubular body 24 which brings about the vacuum condition through the material 23. The tubular body 24 is used for bringing about the vacuum condition through the material 23 and is exhausted to the vacuum condition by the vacuum pump through the flow meter, flow meter control valve. In such a clamp 30, a tension can be controlled with a flow meter valve etc. and therefore the range of fine adjustment becomes wide and fine adjustment of tension can be realized. Accordingly, a fine lead wire 2 can always receive a constant minute tension and is resistive to a mechanical vibration. The clamp 30 does not have a movable part.
申请公布号 JPS58225643(A) 申请公布日期 1983.12.27
申请号 JP19820108933 申请日期 1982.06.23
申请人 SANYO DENKI KK;TOKYO SANYO DENKI KK 发明人 TOMIZAWA TERUYUKI
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址