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发明名称
INTEGRATED CIRCUIT
摘要
申请公布号
JPH01144652(A)
申请公布日期
1989.06.06
申请号
JP19870303511
申请日期
1987.11.30
申请人
NEC CORP
发明人
SUDA TAKATAKE
分类号
H01L21/8238;H01L21/3205;H01L23/52;H01L27/08;H01L27/092;H01L27/10
主分类号
H01L21/8238
代理机构
代理人
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