发明名称 METHOD FOR ALIGNING LCD SUBSTRATE
摘要 <p>PURPOSE:To enable high-accuracy alignment in a short period of time by recognizing the previously stored positions of marks for registration from central position information and making fine registration of an LCD substrate from the registration marks. CONSTITUTION:A prealignment means 1 which aligns the LCD (liquid crystal display) substrate 6 approximately to the prescribed position, a means 8 which determines the central position of this LCD substrate 6 after the prealignment of the substrate 6, and means 10, 14 which recognize the previously stored positions of the registration marks 12, 13 from the resulted central information are provided. The fine registration of the LCD substrate 6 is executed from the resulted registration marks. The central position of the LCD substrate 6 is, therefore, determined after the prealignment and the previously stored positions of the registration marks are recognized. The fine registration is executable by these registration marks. The LCD substrate 6 is thereby aligned with high accuracy in a short period of time.</p>
申请公布号 JPH01144019(A) 申请公布日期 1989.06.06
申请号 JP19870303816 申请日期 1987.12.01
申请人 TERU KYUSHU KK 发明人 YOSHIDA HIDENORI;HIRAYAMA HIROMI
分类号 H01L21/68;G01R31/00;G02F1/13 主分类号 H01L21/68
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