| 摘要 |
PURPOSE:To control a laser output with high accuracy by mounting a compensating circuit compensating a temperature detected by a fine laser detector according to the temperature difference of an ambient temperature in a detector mount and the cooling temperature of the detector mount. CONSTITUTION:A thermocouple 24 detecting the temperature of cooling water and a thermocouple 25 detecting the temperature of an atmosphere in a detector mount 26 are connected to a connector 29, and thermoelectromotive force Ea based on temperature difference is output, and input to a compensator 31a. Thermocouple rows 27, 28 are connected to a connector 30, and thermoelectromotive force Es is output by temperature difference based on heat flux in a fine laser detector, and input to a compensator 31s. Voltage output from the compensators 31s, 31a is amplified by amplifiers K1, K2, and voltage A, B after amplification is input to an adder 32. Added voltage Vsig and output command voltage V1 from an output setter 33 are input to a comparator 34, and difference voltage Vout is output. Accordingly, output voltage or output currents from a power supply 3 are controlled, thus controlling the excitation intensity of a laser medium gas 4, then keeping the intensity of laser beams 7 constant. |
