METHOD FOR PRODUCTION OF HIGH-PURITY NITROGEN

摘要

A process for producing high purity nitrogen comprises introducing a low purity nitrogen contg. oxygen and argon as a raw material gas to adsorbing vessel at -100 -- -200≦̸C, and removing oxygen and argon in the raw material gas by the low temp. adsorption. The raw material gas is pref. nitrogen-rich gas produced from air by a refining column or pref. liquified nitrogen gas stored in the vessel.