| 摘要 |
PURPOSE:To avoid a problem of a floating capacity, and to reduce in size a transformer by providing a matching booster between a discharge electrode and a stepup transformer, and stepping up the power source voltage by three times or more after it is stepped up by the matching booster circuit. CONSTITUTION:A 3-phase AC power source 1 is converted by a converter 2 into a DC power, its pulsation is reduced by a smoothing circuit having a reactor 3 and a capacitor 4, and converted to an AC power by an inverter 5. After the converted AC power is stepped up several times by a booster transformer 6, it is impedance matched with the power source and a load by a matching booster circuit 7, and stepped up several times. The stepped-up AC voltage (300kHz or more) is applied to discharge electrode 8, 9 for exciting laser medium gas, thereby generating a discharge, and an excitation energy is supplied to laser medium gas 10. |
