发明名称 SUPERSONIC OSCILLATOR FOR WIRE BONDER
摘要 PURPOSE:To enable a supersonic oscillator to be used at 100kHz or greater by constituting the front body of the supersonic oscillator in one piece of Ti alloy including cone and horn. CONSTITUTION:A front body 14 of Ti alloy which is in one piece with a back body 12, an even number of electrostrictive elements 13, horn, and cone is fixed in one piece by a connecting screw 15. The length 11 of the back body 12 should be equal to or more than 6mm, which is sufficiently large for screwing the screw 15. The size of each part is set so that the high harmonic resonant frequency is equal to or more than 100kHz and two adjacent modal surfaces of oscillation of the front body 14 are supported by a plurality of screws 20. If a slit 16 for supplying a wire 10 is installed within the surface including the center axis, the oscillation section surface of the front body 14 is nearly at right angle to the axis. Then, the amplitude at the tip of a tool 9 is not affected by the supporting conditions of a holder 19 due to synergistic effect with the supporting position of the set screw 20. A high frequency vibration is possible owing to Ti alloy where the front body is in one piece, there are no boundary layers leading to loss, and the inner friction is of low loss. Bonding rate is fast owing to high frequency.
申请公布号 JPH01143333(A) 申请公布日期 1989.06.05
申请号 JP19870302595 申请日期 1987.11.30
申请人 CHIYOUONPA KOGYO KK 发明人 TAKAO KOICHI;NISHINO SHIGERU;TAKEUCHI AKIRA
分类号 B06B1/06;H01L21/60;H01L21/607 主分类号 B06B1/06
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