| 摘要 |
PURPOSE:To obtain a target material while suppressing cracking and deformation such as warping by subjecting superconductive ceramic powder contg. a rare earth element including Y, an alkaline earth metal and Cu to vacuum hot pressing under specified conditions. CONSTITUTION:When superconductive ceramic powder based on an oxide contg. a rear earth element including Y, an alkaline earth metal and Cu is used as powdery starting material and subjected to vacuum hot pressing in a vacuum atmosphere of <=10<-2>Torr under the conditions of 800-900 deg.C heating temp., 100-200kgf/cm<3> pressure and 1-4hr holding time to produce a target material for forming a superconductive film, the ceramic powder is treated as follows: at the time when the powder attains to a prescribed temp. of 350-700 deg.C during heating to the heating temp., the vacuum atmosphere is replaced with an Ar atmosphere contg. 0.1-10vol.% oxygen under 1-100Torr pressure and the powder is held in the Ar atmosphere contg. oxygen for 1-10hr. The target material is obtd. while suppressing cracking and deformation such as warping. |
