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经营范围
发明名称
MOLECULAR RAY EPITAXY DEVICE
摘要
申请公布号
JPH01141893(A)
申请公布日期
1989.06.02
申请号
JP19870297548
申请日期
1987.11.27
申请人
HITACHI LTD
发明人
GOSHIMA SHIGEO;KAWADA MASAHIKO;MISHIMA TOMOYOSHI
分类号
C30B23/08;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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