| 摘要 |
PURPOSE:To rationally determine a peak position by utilizing a nonlinear mathematical model to determine the peak position and subjecting the waveform obtd. by utilizing a linear technique thereto to curve fitting. CONSTITUTION:A sample material 1 is irradiated with X rays 2 and released photoelectrons 3 are detected by a detector 4. The signal intensity corresponding to bonding energy is determined by a sampling device 5 and the data is stored in a memory device 6. An arithmetic unit 7 executes signal processing offline and output the results thereof to an output device 8. The signal process is executed by first reading out the stored data S1 from the memory device 6, then subjecting the data to noise removal, satellite removal by Kalpha3.4 of the X-ray and background removal to obtain a waveform S2. This waveform S2 is subjected to the waveform sepn. utilizing a max. entropy method (MEM) method to obtain a waveform S3 which is then subjected to the waveform sepn. utilizing Fourier transform to obtain the waveform S4. The peak position determined by the MEM is in succession subjected to the curve fitting to the waveform S4 obtd. by Fourier transform, by which the final separated waveform S5 is obtd. |
