| 摘要 |
PURPOSE:To automatically decide whether the linearity of a linear pattern is good or not by generating a quantized data by bringing the linear pattern to image pickup by a camera, resolving it by parallel straight lines running along the longitudinal direction of the linear pattern and checking the number of dots. CONSTITUTION:A work 3 having a chemically treated linear pattern is placed on a stage 1, and its linear pattern is pickedup by a camera 5. This image pickup signal is inputted to an image processor 10 and a quantized image data is generated. Subsequently, this image data is resolved by plural parallel straight lines running along the longitudinal direction of the linear pattern, and the number of dots of the quantized image data being on each straight line is counted. Next, the straight line whose number of dots has been the largest is decided to be a center line of the linear pattern, a distribution of the dots is checked, based on its center line as a reference and whether the linearity is good or not is decided. |
