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发明名称
VAPOR GROWTH METHOD FOR III-V COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH01141898(A)
申请公布日期
1989.06.02
申请号
JP19870300948
申请日期
1987.11.27
申请人
NEC CORP
发明人
MORI KAZUO
分类号
C30B25/02;C30B29/40;H01L21/205
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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