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发明名称
FORMATION OF RESIST
摘要
申请公布号
JPH01140721(A)
申请公布日期
1989.06.01
申请号
JP19870299406
申请日期
1987.11.27
申请人
SONY CORP
发明人
MORI YOSHIFUMI;ISHIBASHI AKIRA
分类号
G03C1/74;G03C5/00;G03F7/16;G03F7/26;H01L21/027;H01L21/30
主分类号
G03C1/74
代理机构
代理人
主权项
地址
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