| 摘要 |
<p>PURPOSE:To prevent crack generation in a color solid-stage image pickup element due to the temp. of a light shielding part by forming a light shielding part in a peripheral edge of a color separation filter of a color solid image pickup element from resist patterns formed previously dividedly and dyeing for light shielding. CONSTITUTION:Each color element pattern is arranged like a lattice in a color separation filter area 1, and a light shielding area 2 is constituted of a divided pattern area 2a prepd. previously from a resist film to a same shape and same size as the color element pattern of the filter area 1 and a swelled area 2b prepd. thereafter by burying each space between the area 2a. Preferred breadth (a) of a slit between the area 2a is <=1.0mum, and a resist pattern is formed pref. to rectangular blocks having <=15mum length of one edge. The resist pattern is formed by the exposure and development with a mask 3 having an appropriate aperture 3a in the area 2a. By this constitution, crack generation and breakage of a color solid image pickup element due to the temp. of a light shielding part is prevented effectively.</p> |
