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经营范围
发明名称
SPUTTERING APPARATUS
摘要
申请公布号
JPH01139762(A)
申请公布日期
1989.06.01
申请号
JP19870296537
申请日期
1987.11.25
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TANAKA KUNIO;YOSHIDA ZENICHI;IKEDA TANEJIRO
分类号
C23C14/36;C23C14/35
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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