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发明名称
VAPOR DEPOSITION DEVICE FOR PRODUCING SEMICONDUCTOR AND METHOD FOR GROWING SEMICONDUCTOR CRYSTAL
摘要
申请公布号
JPH01139757(A)
申请公布日期
1989.06.01
申请号
JP19870297357
申请日期
1987.11.27
申请人
TOSHIBA CORP
发明人
NOZU TETSUO
分类号
C23C14/22;C23C14/00;H01L21/203
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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