INSPECTION SYSTEM FOR DISCRIMINATING DEFECTIVE ELEMENT,申请号JP19870295039-传众专利搜索

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发明名称	INSPECTION SYSTEM FOR DISCRIMINATING DEFECTIVE ELEMENT
摘要
申请公布号	JPH01138471(A)	申请公布日期	1989.05.31
申请号	JP19870295039	申请日期	1987.11.25
申请人	SUGIMOTO HIDEO	发明人	SUGIMOTO HIDEO
分类号	G01R31/02;G01R33/02;H01L21/66;H01L43/02;H03K17/95	主分类号	G01R31/02
代理机构		代理人
主权项
地址

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