| 摘要 |
PURPOSE: To prevent the reduction in the yield of a semiconductor device by delimiting an X-Y stage body and a drive part and a tool for fixing a semiconductor substrate by providing a paramagnetic body plate between upper and lower parts for constituting a magnetic coupling. CONSTITUTION: A magnetic coupling 9 that is constituted of upper and lower magnets 9A and 9B is provided on an X-Y stage that is constituted of, for example, a base stand 1, a Y stage 2, an X stage 3, a needle bearing 4, a Y drive motor 5, and an X drive motor 6. Then, a paramagnetic body plate 8 for covering the X-Y stage is provided between the magnets 9A and 9B. Then, a substrate fixing tool 10 is sealed onto the coupling 9 and a semiconductor substrate 15 is fixed onto it. By this configuration, particles or oil mist generated from the X-Y stage are suppressed by the paramagnetic body plate 8, thus reducing the possibility of the adhesion of the particles and oil mist on the substrate 15 extremely and preventing the yield of the substrate 15 from decreasing. |
