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发明名称
SUBSTRATE MANIPULATOR FOR MOLECULAR BEAM EPITAXIAL GROWTH
摘要
申请公布号
JPH01138196(A)
申请公布日期
1989.05.31
申请号
JP19870296884
申请日期
1987.11.25
申请人
SUMITOMO ELECTRIC IND LTD
发明人
KIMURA KOZO;TAKAGISHI SHIGENORI;YAO HIDEKI
分类号
C30B23/08;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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