| 摘要 |
PURPOSE:To obtain the above glass member with high ultraviolet transmittance striae-free in any direction, thus suitable for optical lithographic devices, by producing synthetic silica particles from a silane compound with the direct flaming process, depositing said particles on a revolving carrier at a specified rate and converting into molten glass simultaneously. CONSTITUTION:An oxyhydrogen flame generator 4 is fed with a mixed gas comprising a silane compound (e.g., trimethylchlorosilane, methyltrime thoxysilane) and oxygen, oxygen gas and hydrogen gas through inlets 7, 5, and 6, respectively, followed by ignition to produce oxyhydrogen flame 1. With this flame, the silane compound is decomposed to produce silica particles, which are deposited on a revolving carrier 2 at such a rate as to be 1-300mum thick per turn and converted into molten glass simultaneously. Thus, the objective synthetic quartz glass member for optical use causing no disorder of transmitted light can be obtained. |
