| 摘要 |
<p>PURPOSE:To heighten the speed of carrying work, by selecting the frequency of inverter current, according to the detection signal of a detecting means for detecting an object on a carrier. CONSTITUTION:Stators 1-3 are continuously arranged, and a stator 4 and the stator 3 are arranged at a specified interval between them. Then, by a visual sensor 7, the existence of a wafer is detected, and when there is the wafer, then its detection signal is transmitted to a signal processing circuit 8. By the signal processing circuit 8 which received the detection signal, its signal is processed, and the frequency of an inverter 10 is selected. In other words, when there is the wafer, then the acceleration of a carrier 6 is increased to run the carrier at a high speed.</p> |
