OPTICAL TYPE MECHANICAL QUANTITY MEASURING APPARATUS

摘要

PURPOSE:To achieve a three-dimensional measurement by measuring a two- dimensional mechanical quantity utilizing a specle pattern while the mechanical quantity in the axial direction perpendicular to the two-dimensional axis is measured using the specle pattern and light as reference from a light source. CONSTITUTION:Light from the light source 1 enters a polarized beam splitter 21. The light reflected here irradiates a target 4. The light reflected on the target 4 passes through the first PBS1 and enters an x axis light receiver 71 and a y axis light receiver 72. Then, the x-axis displacement and the y-axis displacement of the target 4 are measured from a specle pattern formed on the light receiving surface of these receivers. Light passing through the first PBS from the light source 1 enters the fifth PBS25 as reference light. An interference fringe is created on a Z-axis light receiver 73 by a reflected light from the target 4 whose plane of polarization differs by 90 deg. from each other and the Z-axis displacement of the target 4 is measured.