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发明名称
PLASMA DOPING
摘要
申请公布号
JPH01137625(A)
申请公布日期
1989.05.30
申请号
JP19870296544
申请日期
1987.11.25
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
NAKAYAMA ICHIRO;MIZUNO BUNJI;KUBOTA MASABUMI
分类号
H01L21/265;H01L21/22;H01L21/302;H01L21/3065;H01L21/822;H01L27/04
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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