| 摘要 |
PURPOSE:To improve the development of a resist by using a specified azeotropic compsn. CONSTITUTION:An azeotropic compsn. consisting of 1,1-dichloro-2,2,2- trifluoroethane or 1,2-dichloro-1,1-difluoroethane and 1,1-dichloro-1-fluoroethane is used as the effective component of the title developer. One or more kinds of compds. selected among hydrocarbons, alcohols, ketones, chlorinated hydrocarbons and esters are preferably added to the developer. When the developer is used, the amt. of a chlorine-contg. resist used can be reduced and unfavorable influence on plastics used for a printed circuit board is weakened. |
