发明名称 1,2-Naphthoquinone diazide sulfonyl ester compound with linking benzotriazole groups and light-sensitive composition with compound
摘要 Compounds of the general formula (I) or (II) <IMAGE> (I) <IMAGE> (II) in which R is 1,2-naphthoquinone-2-diazide-4- or -5-sulfonyl and X is a straight-chain or branched C1-C12-alkylene group, which is unsubstituted or mono- or disubstituted by OH group or is -CH=CH-, are suitable as the light-sensitive component in photoresist materials. Both positive and negative images can be prepared with light-sensitive mixtures containing these compounds and a binder.
申请公布号 US4835085(A) 申请公布日期 1989.05.30
申请号 US19870105379 申请日期 1987.10.07
申请人 CIBA-GEIGY CORPORATION 发明人 BAUER, SIGRID
分类号 G03C1/72;C07D235/20;C07D249/18;G03F7/022 主分类号 G03C1/72
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