| 摘要 |
PURPOSE:To manufacture an amorphous target used at the time of producing an optical recording medium by means of sputtering by spraying a molten chalcogenide compound on a rapidly rotating roll in vacuum and rapidly cooling the above to form amorphous foils and then compacting the above foils by hot pressing, etc. CONSTITUTION:At the time of manufacturing a target used in manufacturing an optical recording medium consisting of a chalcogenide compound containing Te, Se, etc., by a sputtering method, first the chalcogenide compound is placed into a heat-resisting vessel 1 made of graphite equipped with a heating coil 4, where the chalcogenide compound is heated by means of the coil 4 and melted so as to be formed into molten chalcogenide compound 3. This molten chalcogenide compound 3 is sprayed in a vacuum atmosphere via a tip nozzle 2 of the vessel 1 onto the surface of a roll 5 made of Cu having chrome plated surface and rotating at a speed as high as 3,000rpm and blown off so as to be formed into amorphous foils 6 of 10-20mum thickness. These foils are compacted into a target by means of hot pressing, etc., by which a chalcogenide compound target having a single-phase crystalline structure can be manufactured. |
