| 摘要 |
PURPOSE: To set a travel distance of a uniaxial table independent of a height difference between a bare chip and a board by a method wherein a table controller which controls a uniaxial table, which moves a suction nozzle in a vertical direction, comparing the detected pressure of a pressure detector with a reference pressure is provided. CONSTITUTION: This system comprises a first uniaxial table 6 which holds and guides a suction nozzle 2 in a vertical direction, a second uniaxial table 13 which holds and drives a bracket 7 in a vertical direction by a motor, and a table controller 14 which controls the motion of the uniaxial table 13 as connected to a pressure detecting section 12. A pressure outputted from a load cell 10 is detected by the pressure detecting suction 12 and compared with a prescribed reference pressure. The table controller 14 stops the uniaxial table 13 at the time when a pressure reaches the prescribed reference pressure. |
