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发明名称
VAPOR GROWTH APPARATUS FOR ORGANIC METAL
摘要
申请公布号
JPH01136330(A)
申请公布日期
1989.05.29
申请号
JP19870293977
申请日期
1987.11.24
申请人
SUMITOMO ELECTRIC IND LTD;NISSIN ELECTRIC CO LTD
发明人
TAKAGISHI SHIGENORI;MORI HIDEKI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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