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发明名称
FORMATION OF INTER-ELEMENT ISOLATION FILM OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01136349(A)
申请公布日期
1989.05.29
申请号
JP19870295769
申请日期
1987.11.24
申请人
NEC KYUSHU LTD
发明人
SAKAMOTO SHINGO
分类号
H01L21/302;H01L21/3065;H01L21/316;H01L21/76
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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