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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01134970(A)
申请公布日期
1989.05.26
申请号
JP19870293502
申请日期
1987.11.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
UGA KIMIHARU
分类号
H01L29/73;H01L21/331;H01L29/72
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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