VAPOR PHASE CRYSTAL GROWTH DEVICE,申请号JP19870293511-传众专利搜索

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发明名称	VAPOR PHASE CRYSTAL GROWTH DEVICE
摘要
申请公布号	JPH01134913(A)	申请公布日期	1989.05.26
申请号	JP19870293511	申请日期	1987.11.19
申请人	MITSUBISHI ELECTRIC CORP	发明人	OTA YOICHIRO;NAGAI YUTAKA
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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