发明名称 DRIVING UNIT FOR BONDING ARM IN BONDING DEVICE
摘要 PURPOSE:To set freely the rotary speed, the amount of rotation, the rotative force and so on of a motive car and to control arbitrarily the movable locus of a capillary and a pressing force at the time of bonding by a method wherein a power source is actuated by a command from a control part. CONSTITUTION:A lead frame 21 with a pellet 22 bonded thereon is placed on a bonding stand 20. An X-Y table 2 is moved on a command from a control part 7 until a capillary 8 is positioned just over a bonding point on the pellet 22. The control part 7 makes a motor 15 rotate by its first action, whereby a belt 13 is moved in a direction A and the capillary 8 of a bonding arm 5 descends in a direction (a). The control part 7 gives a voltage to a driving circuit by its second action in a state that the capillary 8 comes into contact with the bonding point on the pellet 2 and the output of a speed detector 19 becomes 0 and a wire bonding is executed.
申请公布号 JPH01134940(A) 申请公布日期 1989.05.26
申请号 JP19870292537 申请日期 1987.11.19
申请人 TOSHIBA SEIKI KK 发明人 HAYASHI MASAYUKI
分类号 B23K20/00;H01L21/60 主分类号 B23K20/00
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