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发明名称
摘要
申请公布号	JPH0178403(U)	申请公布日期	1989.05.26
申请号	JP19870175382U	申请日期	1987.11.17
申请人		发明人
分类号	G01R31/26;H01L23/02;H01L23/12;H01P1/00;H01P3/08;(IPC1-7):H01P3/08	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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